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EE 292L: Nanomanufacturing

Fundamentals of nanomanufacturing technology and applications. Topics include recent developments in process technology, lithography and patterning. Technology for FinFET transistors, NAND flash and 3D chips. Manufacturing of LEDs, thin film and crystalline solar cells. Flip classroom model is used supplementing classroom lectures with short videos. Guest speakers include distinguished engineers, entrepreneurs and venture capitalists actively engaged in nanomanufacturing. Prerequisite: background in device physics and process technology. Recommended: EE116, EE216, EE212
Terms: Spr | Units: 3
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