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1 - 1 of 1 results for: MATSCI 323: Thin Film and Interface Microanalysis

MATSCI 323: Thin Film and Interface Microanalysis

The science and technology of microanalytical techniques, including Auger electron spectroscopy (AES), Rutherford backscattering spectroscopy (RBS), secondary ion mass spectroscopy (SIMS), ion scattering spectroscopy (ISS), and x-ray photoelectron spectroscopy (XPS or ESCA). Generic processes such as sputtering and high-vacuum generation. Prerequisite: some prior exposure to atomic and electronic structure of solids. SCPD offering.
Last offered: Autumn 2015
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